Wafer Storage RacksWafer_Storage_Racks.html
Reticle/photomask Storage RacksReticle_Photomask_Storage_Racks.html
Cleanroom CartsCleanroom_Carts.html
Specialty Cleanroom TablesSpecialty_Cleanroom_Tables.html
AccessoriesAccessories.html
Mini-environmentsMini-environments.html
Tool Exhaust Balance and MaintenanceContact.html
Cleanroom CertificationContact.html

Cleanroom Certification

Airtek Mini-environment Certification ProcedureCleanroom_Certification_files/Airtek%20Minienvironment%20Certification%202009_1.pdf

Airtek’s offers cleanroom certification for mini-environments. The attached procedure outlines the specification and qualification procedures. The procedure is intended to qualify the performance of mini-environments in terms of contamination control. Test procedures for airflow inside the mini-environment, pressure differential between the mini-environment and the ambient cleanroom, airborne particle count, and flow visualization are described.

Please contact Airtek for further information regarding your specific needs.